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Residual stress and Young's modulus of pulsed laser deposited PZT thin films: Effect of thin film composition and crystal direction of Si cantilevers Sep-18-2019
Date Sep-01-2016
Author Nazeer, H.; Nguyen, M. D.; Rijnders, A.J.H.M.; Abelmann, L.; Sardan Sukas, O.,
Journal Microelectronic Engineering
ETC -
Abstract Capture.PNG

Nazeer, H.; Nguyen, M. D.; Rijnders, A.J.H.M.; Abelmann, L.; Sardan Sukas, O., 

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